MNC2014にて論文発表(深渡瀬)
修士2回生の深渡瀬健君が International Microprocesses and Nanotechnology Conference (MNC 2014, Nov. 4-7, Hilton Fukuoka Sea Hawk Hotel, Fukuoka, Japan) にて口頭発表を行いました.
“The effects of thermal fluctuations and block copolymers compositions on defects in directed self-assembly contact hole shrink process,” ○Ken Fukawatase, Masahiro Ohshima, and Kenji Yoshimoto
