Oral Presentation at International Microprocesses and Nanotechnology Conference (MNC 2014) by Mr. Fukawatase
Mr. Fukawatase (Master course 2nd grade strudent) gave an oral presentation at International Microprocesses and Nanotechnology Conference (MNC 2014, Nov. 4-7, Hilton Fukuoka Sea Hawk Hotel, Fukuoka, Japan).
“The effects of thermal fluctuations and block copolymers compositions on defects in directed self-assembly contact hole shrink process,” ○Ken Fukawatase, Masahiro Ohshima, and Kenji Yoshimoto
